Introduction of Chu-tetramethylammonium hydroxide (TMAH) concentration online monitor in the semiconductor industry

Changsha Chuyi Measurement and Control Professional develops and produces online monitoring instrument (detector, measuring instrument) and tetramethylammonium hydroxide (TMAH) online concentration meter for tetramethylammonium hydroxide (TMAH) concentration. Introduction of the application of tetramethylammonium hydroxide (TMAH) concentration online monitor in the semiconductor industry

Changsha Chuyi measurement and control professional development and production of tetramethylammonium hydroxide (TMAH) concentration online monitor (detector, measuring instrument), tetramethylammonium hydroxide (TMAH) online concentration meter, TMAH online refractometer (refractometer) , tetramethylammonium hydroxide concentration online measuring instrument, TMAH refractometer concentration meter; developer online concentration detector, developer online determination, online TMAH concentration meter.

Tetramethylammonium hydroxide (TMAH) is widely used in the electronics industry as FT-LCD, IC positive gel developer, silicon crystal etchant, CMP process ultra-pure cleaning agent, and also as a developing liquid in liquid crystal displays. With the rapid development of the electronics industry, PCB technology is also developing rapidly. As the key process of PCB graphic imaging - development, it directly affects the quality of the circuit and the quality of the solder resist. The quality requirements of the development cannot be undeveloped, there is no overdevelopment, no dropout and green oil fall off, etc. Point 50% ~ 60% (half of the development section). Therefore, the control of the developer concentration plays a very important role in the development process.

For example, according to the process requirements, the existing concentration of 20% TMAH clean solution should be diluted to the target concentration of 2.48%. The online meter is required to provide accurate TMAH concentration measurement, which has achieved the purpose of accurately configuring the target concentration developer. At present, the domestic post-sampling analysis system measures the concentration of TMAH. The measurement process takes about 20 minutes. This method does not have real-time performance, and the concentration change of the process pipeline cannot be detected in time, resulting in delay in regulation. In order to increase the throughput, the pairing efficiency of the developer needs to be increased, and the ratio of the ratio is shortened. It is necessary to monitor the concentration of TMAH online in real time to improve the process control requirements. The TMAH online concentration meter with refractive principle can meet the requirements of online detection and has high measurement accuracy.
The tetramethylammonium hydroxide (TMAH) on-line concentration meter uses the principle of refraction to measure the refractive index of the solution. The refractive index has an excellent correspondence with the concentration of TMAH solution. The actual concentration of the solution is obtained by conversion. This measuring principle is stable and has high precision. It is suitable for installation in pipeline installation or container wall, as well as other installation methods.

Advantages of the tetramethylammonium hydroxide (TMAH) concentration meter:
1. On-line continuous detection, no need for manual and frequent sampling laboratory testing, saving a lot of manpower and financial resources 2. Eliminating manual detection errors and ensuring product consistency 3. Continuous measurement, rapid feedback, improving product quality 4. Improving automation, relevant The concentration data can be connected to the central control room through the form of networking. 5. Not affected by solution bubbles and pressure (compared to the density method)
CY-TMAH online concentration sensor
Product number CY-TMAH-A CY-TMAH-D
Measuring range 0.0 to 30.0%
Resolution ( Brix ): 0.1% Temperature: 0.1 ° C
measurement accuracy ±0.1% temperature ±0.5°C
measure temperature 5 to 100 ° C (automatic temperature compensation)
Ambient temperature 5 to 40 ° C
Input power DC 24V
Key material Sensor housing: SUS316L
Signal output DC4 to 20mA RS-232
Protection level IP67 dustproof, splashproof
Highest pressure
Product Size ¢99X175
Option * Cleaning kit CY-CL77
*CY-TMAH-D is recommended to use CY-MC concentration controller

China Hardware Business NetworkChina Hardware Business Network Http://news.chinawj.com.cn Editor: (Hardware Business Network Information Center) http://news.chinawj.com.cn

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